Keithley S600
The Keithley S600 is a parametric test system designed for semiconductor device characterization. It is a modular and configurable platform that can be used to perform a variety of electrical tests on semiconductor wafers and devices.
- Model
- Keithley S600
- Calibration
- Available on request
- Price
- $28,000
- Status
- In stock
- RFQ ref
- S600
This unit
The Keithley S600 Series Parametric Test System is a modular, configurable platform for semiconductor device characterization designed to reduce cost of test across fabs and wafer foundries. Built on flexible architecture supporting per-pin electronics, the S600 delivers current and voltage source/measurement plus capacitance measurement on each DUT pin. Its high throughput and femtoamp-level sensitivity enable production testing of SoC, FeRAM, MRAM, PCRAM, and high-density devices while protecting test software investment through platform compatibility.
Technical Specifications
Measurement ranges: fA to 1 A (current); µV to 200 V (voltage, all Kelvin)
RF capability: On-wafer s-parameter testing to 40 GHz with integrated Vector Network Analyzer
Per-pin architecture with bi-directional current scaling amplifiers on each probing pin
S680 configuration features active electronics mounted directly on prober
Key Features
Per-pin source/measure units (SMUs) with full source/measure capability on all pathways and pins
Superior DC measurement capability with broad testing flexibility
Capacitance measurement on each pin
RF option integrates DC and RF testing in single-insertion system
Eliminates noise artifacts and second-order effects including leakage and parasitic capacitance
S680 configuration supports femtoamp-level DC leakage characterization, ultra-thin gate dielectrics, SOI, and new materials
Typical Applications
Process control and equipment tuning/optimization
Wafer acceptance testing and qualification
Device modeling and characterization
New technology device testing (SoC, FeRAM, MRAM, PCRAM, high-density devices)
Compatibility & Integration Keithley Test Environment (KTE) software provides high platform-to-platform compatibility across S600 Series testers. KTE runs on Linux or Solaris/UNIX platforms, ensuring smooth migration paths and protecting test software investment during system upgrades.
Specifications
| Parameter | Value |
|---|---|
| Frequency Range | DC to 40 GHz | Voltage / Current Range: fA to 1 A, µV to 200 V |
Keithley S600 — Repair & Calibration Service
Aumictech offers NIST-traceable calibration and repair for the Keithley S600. Calibration covers analog input channel accuracy and offset at all gain settings, analog output accuracy, digital I/O logic threshold verification, sample rate and timing accuracy, and trigger and synchronization bus functional verification. NI CompactRIO and PXI chassis also undergo backplane trigger line integrity check.. All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.
Common Keithley S600 faults: power supply failure (cRIO-9073/9074), C-series slot connector wear, PXI chassis fan failure, GPIB interface failure on VXI controllers, BIOS/EEPROM corruption. NI CompactRIO most common faults are power supply failure on older cRIO-9073/9074 chassis and C-series module slot connector wear from repeated hot-swap cycles. PXI chassis fan failure is the most common wear item — chassis fans are field-replaceable. VXI embedded controllers most commonly develop EEPROM corruption and GPIB interface failure.
Keithley S600 price
This Keithley S600 is listed at $28,000. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.
Keithley S600 calibration cost
NIST-traceable calibration for the Keithley S600 is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers analog input channel accuracy and offset at all gain settings, analog output accuracy, digital I/O logic threshold verification, sample rate and timing accuracy, and trigger and synchronization bus functional verification. NI CompactRIO and PXI chassis also undergo backplane trigger line integrity check.. Turnaround is 1 to 3 business days after receipt. See full calibration details →
