KLA Tencor 0020839-000 Robot Controller Housing and Power Supply
KLA Tencor Industrial Controllers & PLCs.
- Model
- KLA Tencor 0020839-000
- Calibration
- Available on request
- Price
- $2,100
- Status
- In stock
- RFQ ref
- 0020839-000
This unit
The KLA Tencor 0020839-000 is a robot controller housing and power supply unit that provides protective enclosure and reliable power delivery for robot controllers within KLA Tencor automated manufacturing systems. This component is integral to semiconductor processing equipment, including wafer handling, inspection, and defect classification platforms such as the Confocal Review Station (CRS), where it ensures stable operation of robotic control modules managing wafer transport and positioning.
Technical Specifications
Part Number: 0020839-000
Manufacturer: KLA Tencor
Function: Integrated controller housing with dedicated power supply for robotic automation systems
Weight Reference: Related controller units approximate 25 lbs
Key Features
Protective enclosure design safeguards controller electronics in manufacturing environments
Integrated power supply ensures stable voltage delivery to robotic control modules
System-level power distribution for multi-axis robot coordination
SEMI standards support: E84, E87, E40, E90, E94 compliance
GEM/SECS 232 interface support (SEMI-E4, E5, E30)
Ethernet connectivity via NFS SW interface
Tencor File Format and KLARF Format data compatibility
Typical Applications
Wafer defect classification and review systems
Automated wafer handling and transport
Robotic loadport control in semiconductor manufacturing
Precision inspection equipment requiring coordinated robotic motion
High-volume manufacturing environments demanding reliable automation control
Compatibility & Integration Designed for KLA Tencor automated equipment platforms, including wafer handlers, loadports, and inspection systems. Supports integration with Brooks/PRI Automation robotic components such as robot rails and related subsystems. Facilitates communication within larger manufacturing execution systems through SEMI-standard interfaces and Ethernet networking.
KLA Tencor 0020839-000 — Repair & Calibration Service
Aumictech offers NIST-traceable calibration and repair for the KLA Tencor 0020839-000. Calibration covers I/O channel accuracy per specification, analog output and input calibration to rated accuracy, and functional communication interface test (serial, Ethernet, fieldbus). All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.
Common KLA Tencor 0020839-000 faults: blown I/O fuses, failed analog modules, power supply capacitor failure. Common faults include blown I/O protection fuses, failed analog I/O modules, power supply capacitor failure, and serial or Ethernet communication port damage.
KLA Tencor 0020839-000 price
This KLA Tencor 0020839-000 is listed at $2,100. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.
KLA Tencor 0020839-000 calibration cost
NIST-traceable calibration for the KLA Tencor 0020839-000 is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers I/O channel accuracy per specification, analog output and input calibration to rated accuracy, and functional communication interface test (serial, Ethernet, fieldbus). Turnaround is 1 to 3 business days after receipt. See full calibration details →
