Keysight / Agilent / HP 10897C High Resolution Laser Axis Board

The Keysight/Agilent/HP 10897C High Resolution Laser Axis Board is a VMEbus-compliant measurement interface designed for precision positioning and metrology in advanced manufacturing and IC fabrication environments. This board delivers position data with 0.3 nm resolution and processes a 36-bit position word in fractional wavelengths, enabling ultra-accurate motion control and positioning feedback.

Technical Specifications

Measurement Resolution: 0.3 nm (3 Angstroms) with compatible high-resolution plane mirror interferometers

Position Word: 36-bit format in fractional wavelengths; any 32 of 35 bits selectable via 2's Complement logic with positive logic control

Data Rate: >100 kHz over backplane; 10 MHz hardware position output data update rate with synchronization to slower clocks

Sample Data Age: Approximately 290 ns or 790 ns before sample initiation (position register); approximately 1.2 µs before next 10 MHz clock rising edge (hardware output line)

Sample Delay: Position register readable 100 ns or 600 ns after hardware sample operation

Power Requirements: 5 Vdc ± 0.25 V / -0.125 V at <3.5 A; +12 V ± 0.5 V at <0.1 A; -12 V ± 0.5 V at <0.025 A

Cooling Requirements: 19 linear meters/minute (0–40°C); 76 linear meters/minute minimum (0–55°C)

Key Features

VMEbus Revision C.1 compliance with support for A16/D16, A24/D32, and D08(O) interrupt acknowledge cycles

Real-time position data accessible via VMEbus and P2 connector (A and C rows)

Programmable signal routing for reference and measurement signals from front panel, P2 connector, or multiaxis interconnect cable

Proprietary interpolator optimized for high-resolution applications

Low-noise design improves measurement repeatability

Surface-mount construction for compact, reliable operation

Typical Applications

Precision IC fabrication metrology

High-accuracy motion control systems

Laser interferometer-based positioning feedback

Advanced manufacturing process monitoring

Compatibility & Integration Designed for integration into VMEbus systems and compatible laser interferometer measurement platforms requiring fractional-wavelength positioning accuracy.