Agilent/Keysight 10898D

The Keysight 10898D is a dual-axis laser interferometry board engineered for high-resolution position measurement and motion control in precision industrial systems. It delivers 0.3 nm (3 Å) measurement resolution using plane mirror interferometer optics, with 0.6 nm plane mirror resolution and submicrosecond timing accuracy. The board integrates a proprietary interpolator and surface-mount architecture within a compact VMEbus form factor, supporting working ranges to ±10.6 m and slew rates to 2700 mm/s.

Multi-board systems synchronize to ±2 ns, enabling coordinated motion across up to 7 boards per installation.

Technical Specifications

• Measurement resolution: Up to 1/2048 (0.3 nm with high-resolution plane mirror interferometer)


• Plane mirror resolution: 0.6 nm


• System PM velocity limit: ±1100 mm/s


• Tested slew rates: 2700 mm/s plane mirror equivalent


• Maximum linear interferometer velocity: 2.2 m/s


• Working range (plane mirror optics): ±10.6 m


• Data update rate: 10 MHz (single channel), 5 MHz (dual channel)


• Backplane data rate: >100 kHz


• Direct hardware output rate: 10000 kHz


• Axes per board: 2


• Data word format: 36-bit 2's complement


• Variable data age: <800 ps over supply voltage range, <40 ps/°C


• Fixed data age (time lag): Approximately 1.1 µs


• Position data availability: 600 ns (N=262 ns) or 100 ns (N=762 ns) after sampling on VMEbus


• Multi-board synchronization: ±2 ns

Key Features

• Programmable low-pass filter for low signal-to-noise operation


• VMEbus Revision C.1 electrical compliance


• Programmable signal routing for flexible system layout


• Reference and measurement signal routing from front panel or multiaxis interconnect cable


• Real-time hardware outputs on P2 connector rows A and C

Typical Applications

• Semiconductor fabrication equipment


• Electron beam lithography systems


• Step-and-scan IC lithography tools


• Precision motion control platforms

Compatibility & Integration

• Receiver cables: Keysight 10880A/B/C or N1250A/B/E


• Laser head cables: Keysight 10881A/B/C/D/E/F


• System scalability: Up to 7 boards per installation (consult Keysight for larger configurations)