Agilent/Keysight 5517CN05

The Agilent/Keysight 5517CN05 is a laser head that generates a coherent, collimated two-frequency beam for high-precision measurement and metrology applications. Operating at 632.991354 nm vacuum wavelength with orthogonally polarized frequency components, it delivers 180 µW to 1 mW output power with exceptional wavelength stability of 2 ppb over 1 hour and 20 ppb lifetime. The unit achieves maximum velocity of 711 mm/s with linear optics and warm-up in under 10 minutes, making it suitable for demanding semiconductor manufacturing and interferometer-based systems.

Technical Specifications

• Wavelength: 632.991354 nm (vacuum)


• Output Power: 180 µW minimum; <1 mW maximum


• Beam Diameter: 6 mm standard; 3 mm (Option 003) or 9 mm (Option 009)


• Beam Height: 79.5 ± 1.0 mm


• Reference Frequency: 2.4 to 3.0 MHz


• Maximum Velocity: 711 mm/s (linear optics)


• Wavelength Stability: 2 ppb (1 hour); 20 ppb (lifetime)


• Wavelength Accuracy: ±0.1 ppm standard; ±0.02 ppm (with optional calibration)


• Warm-up Time: <10 minutes


• Power Consumption: 23 W (operation); 35 W (warm-up)


• Input Power: +15 V ±0.3 V @ 3.0 A max; −15 V ±0.3 V @ 0.3 A max


• Dimensions: 35.9 × 13.2 × 12.8 cm


• Weight: 3.4 kg


• Cooling: Vented design requiring 4 m/s minimum airflow through 50 mm diameter duct

Key Features

• Orthogonally polarized frequency components (f1 horizontal, f2 vertical)


• Class II Laser Product per 21 CFR 1040.10 and 1040.11


• CE marked


• Suitable for VME- and PC-based interferometer systems

Typical Applications

• High-precision measurement and metrology systems


• Semiconductor manufacturing and lithography


• Flat panel display manufacturing


• High-velocity motion measurement applications

Compatibility & Integration Compatible with Keysight 5501A and 5527A systems, VME- and PC-based platforms, and the Keysight 10719A receiver. Requires compatible power supply such as Keysight 10884B for +15 V delivery to laser head and receivers.