Brooks Instrument 5850i Carbon Dioxide Mass Flow Controller

The Brooks Instrument 5850i is a mass flow controller engineered for precise, repeatable control of carbon dioxide gas flow in demanding industrial manufacturing environments. It delivers stable measurement and control through a unique flow sensor technology and maintains mechanical and electrical compatibility with other mass flow controllers for seamless system integration. ## Technical Specifications Flow Performance • Flow range: 3 sccm to 1000 SLPM (CO2 specific ranges include 5 SLPM and 12 SLPM) • Accuracy: ±1% of full scale (≤20 SLPM); ±1.5% of full scale (>20 SLPM) • Repeatability: 0.25% of rate • Control range: 50:1 turndown ratio • Response time: <6 seconds to within 2% of full scale with 0–100% step command Stability & Environmental • Zero stability: <0.2% of full scale per year; temperature coefficient <±0.075% per °C • Span stability: temperature coefficient <±1.0% over 10–50°C range • Mounting attitude sensitivity: ±0.5% maximum full scale deviation after re-zeroing • Pressure coefficient: ±0.03% per psi (up to 200 psig, N₂ equivalent) Operating Pressures • Maximum working pressure: 1500 psi (10.342 MPa) • Allowable differential pressure: 5–50 psi minimum–maximum • Leak integrity (outboard): 1 × 10⁻¹⁰ atmosphere cc/sec (helium) Electrical • Power supply: +15 to +28 Vdc • Power consumption: 2.5 SLPM) ## Typical Applications Critical gas delivery in semiconductor manufacturing, analytical instrumentation, laboratory research, and precision industrial processes requiring CO₂ flow regulation. ## Compatibility & Integration Mechanically and electrically compatible with existing mass flow controller installations, supporting standard analog control interfaces and reducing integration complexity.