Brooks Instrument 5850i Carbon Dioxide Mass Flow Controller
Brooks Instrument Industrial Controllers & PLCs. Accuracy: ±1% of full scale (≤20 SLPM), Sensitivity: ±0.5% maximum full scale deviation after re-zeroi.
- Model
- Brooks Instrument 5850i
- Calibration
- Available on request
- Price
- $450
- Status
- In stock
- RFQ ref
- 5850i
This unit
The Brooks Instrument 5850i is a mass flow controller engineered for precise, repeatable control of carbon dioxide gas flow in demanding industrial manufacturing environments. It delivers stable measurement and control through a unique flow sensor technology and maintains mechanical and electrical compatibility with other mass flow controllers for seamless system integration.
Technical Specifications Flow Performance
Flow range: 3 sccm to 1000 SLPM (CO2 specific ranges include 5 SLPM and 12 SLPM)
Accuracy: ±1% of full scale (≤20 SLPM); ±1.5% of full scale (>20 SLPM)
Repeatability: 0.25% of rate
Control range: 50:1 turndown ratio
Response time: <6 seconds to within 2% of full scale with 0–100% step command Stability & Environmental
Zero stability: <0.2% of full scale per year; temperature coefficient <±0.075% per °C
Span stability: temperature coefficient <±1.0% over 10–50°C range
Mounting attitude sensitivity: ±0.5% maximum full scale deviation after re-zeroing
Pressure coefficient: ±0.03% per psi (up to 200 psig, N₂ equivalent) Operating Pressures
Maximum working pressure: 1500 psi (10.342 MPa)
Allowable differential pressure: 5–50 psi minimum–maximum
Leak integrity (outboard): 1 × 10⁻¹⁰ atmosphere cc/sec (helium) Electrical
Power supply: +15 to +28 Vdc
Power consumption: 2.5 SLPM)
Typical Applications Critical gas delivery in semiconductor manufacturing, analytical instrumentation, laboratory research, and precision industrial processes requiring CO₂ flow regulation.
Compatibility & Integration Mechanically and electrically compatible with existing mass flow controller installations, supporting standard analog control interfaces and reducing integration complexity.
Specifications
| Parameter | Value |
|---|---|
| Voltage / Current Range | '+15 to +28 Vdc |
Brooks Instrument 5850i — Repair & Calibration Service
Aumictech offers NIST-traceable calibration and repair for the Brooks Instrument 5850i. Calibration covers I/O channel accuracy per specification, analog output and input calibration to rated accuracy, and functional communication interface test (serial, Ethernet, fieldbus). All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.
Common Brooks Instrument 5850i faults: blown I/O fuses, failed analog modules, power supply capacitor failure. Common faults include blown I/O protection fuses, failed analog I/O modules, power supply capacitor failure, and serial or Ethernet communication port damage.
Brooks Instrument 5850i price
This Brooks Instrument 5850i is listed at $450. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.
Brooks Instrument 5850i calibration cost
NIST-traceable calibration for the Brooks Instrument 5850i is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers I/O channel accuracy per specification, analog output and input calibration to rated accuracy, and functional communication interface test (serial, Ethernet, fieldbus). Turnaround is 1 to 3 business days after receipt. See full calibration details →
