Brooks Instrument / Celerity / Unit Instruments UFC-8100 High Flow Mass Flow Controller

The Brooks Instrument / Celerity / Unit Instruments UFC-8100 High Flow Mass Flow Controller delivers precision gas flow regulation using thermal sensing technology and electromagnetic valve control. Engineered for industrial process applications, it combines the patented IsoSensor with minimal dead space to achieve rapid response and exceptional stability across pressure and temperature variations. The controller supports both analog and digital configurations, with DeviceNet communication available and MultiFlo™ technology enabling gas-type changes without system removal.

Technical Specifications

Flow Control Method: Thermal mass flow sensing with electromagnetic valve actuation

Accuracy (Nitrogen calibration): ±1% of setpoint (digital models 8101, 8105); ±1% of full scale (analog model 8100)

Repeatability: Better than 0.15% of full scale

Fast Start Response: ≤1.0 sec to within 2% of setpoint (per SEMI E17-91)

Soft Start Ramp Options: 5-second linear ramp with selectable intervals (4–6, 6–10, 10–15, 20–30, or 40–60 seconds) for analog MFCs; 0–20 seconds for digital MFCs via MultiFlo Virtual Interface

Valve Cycle Life: Over 8 million cycles with no performance degradation

Sensor Drift: Ultra-low via IsoSensor technology

Attitude Insensitivity: IsoSensor eliminates thermal siphoning effects

Surface Finish: 32 µ inch Ra for relevant applications

Footprint: 1.5 inches

Key Features

IsoSensor orientation-insensitive design reduces recalibration intervals

Minimized dead space for enhanced accuracy and faster transient response

Auto shut-off option: valve closure below 2% setpoint (0.1 VDC); digital models allow adjustment up to 10% of full scale via MultiFlo Virtual Interface

Card edge connector standard with detailed pinout configurations available

Model 8105 offers full ODVA/SEMI compliance for DeviceNet integration

Electrical & Interfaces

Analog and digital configurations available

DeviceNet communication (SEMI Std. Doc. #2602)

MultiFlo™ Technology for dynamic gas-type and range adjustment without removal

Materials & Process Compatibility

Controller body: 316 Stainless Steel, Brass, or Aluminum (FC 8744)

Diaphragm options: Buna-N, Teflon®, or Viton® fluoroelastomers

O-ring materials: Viton® fluor and additional elastomer options

Process gases: Non-corrosive, non-ultraclean applications