Agilent/Keysight 10704A

The Keysight 10704A is a cube corner retroreflector engineered for single-beam laser interferometry measurements. This optical component reflects incident laser beams back along their original axis, enabling precision positioning and dimensional metrology when integrated with compatible interferometer systems, laser heads, and control electronics. Designed for beam diameters of 6 mm or less, the 10704A weighs 10.5 g and features optical elements bonded to stainless steel housings using low volatility UHV-compatible adhesive, making it suitable for vacuum environments.

Technical Specifications

• Product Type: Cube corner retroreflector


• Measurement Application: Single-beam interferometry


• Beam Diameter Compatibility: 6 mm or less


• Weight: 10.5 g (0.4 oz)


• Construction Material: Stainless steel housing with optically contacted elements; bonding adhesive rated for UHV applications


• Mounting: Precision-engineered for beam steering and alignment

Key Features

• Compact form factor minimizes probe mass in dynamic measurement applications


• UHV-compatible construction enables use in vacuum or controlled atmosphere systems


• Designed for integration with PC and VMEbus-compatible measurement architectures


• Optical performance optimized for pairing with the Keysight 10705A single-beam interferometer

Typical Applications

• Semiconductor manufacturing (wafer steppers, step-and-scan lithography tools)


• Precision machine tool positioning and error mapping


• Aerospace and defense component metrology


• 3D package dimensional verification


• Coordinate measuring machines (CMMs)


• Flat panel display production metrology


• Research-level laser interferometry

Compatibility & Integration The 10704A requires a complete system comprising a laser head, interferometer electronics, and control software. Primary integration is with the Keysight 10705A interferometer. The retroreflector mounts within measurement fixtures designed to position it along the optical axis. Alternative cube corner options include the 10713C (1/2 inch) and 10713D (1/4 inch) for applications with different mounting constraints or mass requirements.