Keysight / Agilent / HP 10897B High Resolution Laser Axis Board

The Keysight/Agilent/HP 10897B High Resolution Laser Axis Board is a VMEbus-integrated positioning feedback component delivering sub-nanometer measurement resolution for precision motion control. This 6U board enables closed-loop systems in semiconductor manufacturing, metrology, and advanced imaging applications where positional accuracy below the nanometer scale is essential.

Technical Specifications Measurement Resolution

λ/2048, equivalent to 0.3 nm (3 Angstroms) Slew Rate Performance

700 mm/s plane mirror equivalent; double the performance of the 10897A model Data Age and Timing

Ambiguity: less than 1 ns

Fixed delay: user-selectable at 290 ns or 790 ns post-synchronous sample

Variable delay: typically less than 800 ps across full power supply range; less than 60 ps/°C temperature coefficient Data Transfer

VMEbus backplane rate: greater than 100 kHz Power Requirements

5 Vdc +0.25 V/–0.125 V at less than 3.5 A

+12 V ±0.5 V at less than 0.1 A

–12 V ±0.5 V at less than 0.025 A

Key Features

36-bit position word output in fractional wavelengths (2's Complement)

Programmable low-pass filter for noise-optimized operation

Hardware position output via P2 connector (A and C rows)

VMEbus Revision C.1 electrical and mechanical compliance

Minimal position data latency for real-time motion compensation in E-beam and step-and-scan systems

Typical Applications Semiconductor lithography, electron-beam patterning, optical metrology, precision stage positioning, and IC fabrication equipment requiring deterministic closed-loop feedback with sub-wavelength accuracy.

Compatibility & Integration Designed for VMEbus backplane integration with standard 6U form factor. Position data accessible via VMEbus interface and P2 connector hardware outputs simultaneously.