Agilent/Keysight 10897D

The Keysight 10897D is a high-resolution VMEbus laser axis board delivering precision displacement measurement and control for single-axis applications. Engineered for semiconductor fabrication and advanced manufacturing, it combines sub-nanometer resolution with programmable signal routing and multi-board synchronization. The board reduces data age uncertainty to less than 1 nanosecond, critical for dynamic positioning systems requiring superior accuracy.

Technical Specifications

• Single measurement channel per board; up to seven boards per system


• Data format: 36-bit 2's complement


• Linear optics resolution: 1.2 nm (λ/512)


• Plane mirror optics resolution: 0.6 nm (λ/1024)


• High resolution optics: 0.3 nm (λ/2048) Velocity Performance (Plane Mirror Optics)


• Keysight 5517GL, 5517DL: ±0.670 m/s


• Keysight 5517FL: ±0.700 m/s


• Keysight 5517EL: ±0.790 m/s


• Keysight 5517D: ±0.500 m/s


• Keysight 5517C: ±0.356 m/s


• System velocity limit: ±790 m/s (general); ±1100 m/s with Keysight E1709A receiver Timing & Data Rates


• Position update rate: 10 MHz


• Direct hardware output data rate: 10,000 kHz maximum


• Bus data rate: 100 kHz maximum


• Multi-board synchronization: ±2 ns


• Data age uncertainty: Less than 1 ns Signal Conditioning


• Programmable onboard low-pass filter for noise rejection in low signal-to-noise environments

Key Features

• VMEbus (Revision C.1) compliant, 6U form factor


• Programmable signal routing from front panel, P2 connector, or multi-axis interconnect cable


• Supports multiple laser head and receiver cable options for system flexibility

Typical Applications

• Semiconductor fabrication, inspection, and repair


• E-beam lithography machines


• Step-and-scan IC fabrication tools


• High-bandwidth closed-loop positioning systems


• Dynamic measurement in moving systems

Compatibility & Integration Compatible receiver cables: Keysight 10880A/B/C, N1250A/B/E. Compatible laser head cables: Keysight 10881A/B/C/D/E/F.