Bruce Technologies / Amtech Systems INTEMPO-S Intelligent Temperature Controller
Bruce Technologies / Amtech Systems Industrial Controllers & PLCs.
- Model
- Bruce Technologies / Amtech Systems INTEMPO-S
- Calibration
- Available on request
- Price
- $1,100
- Status
- In stock
- RFQ ref
- INTEMPO-S
This unit
The Bruce Technologies/Amtech Systems INTEMPO-S is an intelligent temperature controller engineered for precise thermal management in horizontal diffusion and VCVD furnaces used in semiconductor fabrication. It delivers advanced rule-based control algorithms with multi-zone temperature regulation, thermocouple input sensing, and intelligent failure protection to safeguard wafer loads and process integrity. The controller combines fast scan rates with enhanced furnace recovery capabilities to reduce cycle times and increase throughput, making it essential for demanding silicon carbide and silicon power device manufacturing environments.
Technical Specifications
Temperature Control: Five-zone control architecture with advanced rule-based algorithms and PID functionality
Thermal Management: Enhanced temperature accuracy and stability with improved furnace recovery
Sensor Input: Thermocouple-based temperature sensing
Control Output: Heater element management and thermal actuator control
Protective Functions: Load element short/open circuit protection via Impedance Relay function; thermocouple failure detection and safeguarding
Response: Increased scan rates for faster system reaction
Power Supply: 200–480 VAC or 200–690 VAC, 3-Phase, 50/60 Hz; universal control supply 90–270 V AC, 50/60 Hz
Key Features
Rule-based profile thermocouple control prevents costly wafer loss during sensor failures
Multi-zone architecture enables independent thermal zone management
PID control capability supports standalone operation or integrated process control
Impedance Relay protection guards against heating element faults
Fast thermal recovery reduces overall process cycle time
Typical Applications
Horizontal diffusion furnace thermal management
VCVD (Vertical Chemical Vapor Deposition) process control
Silicon carbide device fabrication
Silicon power device manufacturing
High-volume semiconductor production requiring consistent thermal profiles
Compatibility & Integration
Accepts standard thermocouple inputs for temperature measurement
Compatible with 3-phase industrial power distribution (50/60 Hz)
Operates from universal control supply voltages supporting global deployment
Model designations: INTEMPO-S; also identified as Model 7640 or Kokusai 2173097
Specifications
| Parameter | Value |
|---|---|
| Voltage / Current Range | 200–480 VAC or 200–690 VAC 3-Phase, 50/60 Hz, 50/60 Hz |
Bruce Technologies / Amtech Systems INTEMPO-S — Repair & Calibration Service
Aumictech offers NIST-traceable calibration and repair for the Bruce Technologies / Amtech Systems INTEMPO-S. Calibration covers I/O channel accuracy per specification, analog output and input calibration to rated accuracy, and functional communication interface test (serial, Ethernet, fieldbus). All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.
Common Bruce Technologies / Amtech Systems INTEMPO-S faults: blown I/O fuses, failed analog modules, power supply capacitor failure. Common faults include blown I/O protection fuses, failed analog I/O modules, power supply capacitor failure, and serial or Ethernet communication port damage.
Bruce Technologies / Amtech Systems INTEMPO-S price
This Bruce Technologies / Amtech Systems INTEMPO-S is listed at $1,100. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.
Bruce Technologies / Amtech Systems INTEMPO-S calibration cost
NIST-traceable calibration for the Bruce Technologies / Amtech Systems INTEMPO-S is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers I/O channel accuracy per specification, analog output and input calibration to rated accuracy, and functional communication interface test (serial, Ethernet, fieldbus). Turnaround is 1 to 3 business days after receipt. See full calibration details →
