Agilent/Keysight N9200-61010 (E5260A E5260B)

The Agilent/Keysight N9200-61010 mainframe is an 8-slot chasscan host up to eight plug-in Source Measure Unit (SMU) modules for precision I-V characterization of semiconductors, components, and materials. This scalable platform combines high-speed measurement capability with configurable sourcing and compliance functions, delivering femtoampere-level current resolution and sub-microvolt voltage sensitivity. GPIB connectivity enables integration into automated parametric test systems, while the onboard high-speed ADC supports true parallel measurements and pulse testing from 500 µs to 2 s pulse widths.

Technical Specifications

• Mainframe: 8-slot high-speed measurement chassis


• SMU Module Capacity: Up to eight single-slot or equivalent multi-slot combinations


• Operating Range: ±200 mA / ±200 V


• Current Measurement Resolution: As low as 0.1 fA; capable of 5 pA measurements


• Voltage Measurement Resolution: 0.5 µV minimum


• Current Sourcing: Up to 1 A


• Voltage Sourcing: Up to 200 V


• Voltage Compliance: 0 V to ±200 V


• Current Compliance: ±100 pA to ±1 A


• Pulse Measurement: Pulse width 500 µs to 2 s; pulse period 5 ms to 5 s


• Ground Unit Output: 0 V ±100 µV; sink capacity 4 A


• Maximum Module Power Consumption: 80 W


• Warm-up Time: 40 minutes for rated accuracy


• Calibration Interval: 1 year

Key Features

• High-speed ADC for accelerated test throughput and parallel measurement capability


• Modular architecture supporting HPSMU, MPSMU, HRSMU, and ASU module types


• Integrated ground unit with ultra-low output offset


• Voltage and current compliance protection for device safety


• Kelvin connection support for low-resistance measurement accuracy

Typical Applications

• Semiconductor device characterization and parameter extraction


• Material conductivity and resistivity analysis


• Component reliability and stress testing


• Leakage current measurement in microelectronic devices

Compatibility & Integration

• Interface: GPIB for remote control and automated test integration


• Software: EasyEXPERT group+ for device characterization workflows


• Measurement Reference: Specifications referenced to Zero Check terminal with 128-sample averaging at 1 PLC and filter ON