Agilent/Keysight 5517FL
Agilent / Keysight Optical Light Sources. Wavelength: 632.99139 nm (nominal, Accuracy: ±0.1 ppm (3 sigma.
- Model
- Agilent / Keysight 5517FL
- Calibration
- Available on request
- Price
- $950
- Status
- In stock
- RFQ ref
- 5517FL
This unit
The Agilent/Keysight 5517FL is a Class II helium-neon laser source engineered for high-precision dual-frequency interferometry in demanding metrology and positioning applications. Operating at 632.99139 nm, this laser delivers stable output exceeding 65 µW (minimum, with degradation to 50 µW after 3 years) and supports measurement ranges to 40 meters across all axes. The 5517FL is optimized for VME and PC-based laser interferometer systems requiring high-velocity motion, particularly in semiconductor lithography and flat panel display manufacturing environments.
Technical Specifications
Optical Performance- Wavelength: 632.99139 nm (nominal, vacuum)
- Wavelength accuracy: ±0.1 ppm (3 sigma, lifetime); ±0.02 ppm with factory calibration to MIL-STD 45663
- Wavelength stability: ±0.002 ppm (1 hour, typical); ±0.02 ppm (lifetime)
- Output power (minimum): >65 µW standard; >300 µW with option H01
- Maximum output power: 1 mW
- Beam diameter: 6 mm standard; 9 mm with option 009
- Beam height: 80.8 ± 1.0 mm Measurement & Performance
- Maximum linear velocity: 2 m/s with E1709A receiver (linear optics)
- Reference frequency: ≥7.0 MHz standard; 7.2 MHz with option 300
- Measurement range: 40 meters (sum of all axes)
- Warm-up time: 45 minutes (vented cover with fan); 90 minutes (vent body with fan) Electrical
- Power requirement: +15 V ±0.3 V at 2.2 A maximum; −15 V ±0.3 V at 0.03 A maximum
- Heat dissipation: 23 W operating; 35 W warm-up
- MTBF: >50,000 hours typical
Key Features
- Class II laser conforming to 21 CFR 1040.10 and 1040.11
- Compact 3.2 kg form factor with 10.16 cm clearance required for cabling
- High wavelength accuracy enabling precision optical alignment
Typical Applications
- VME-based laser interferometer systems
- PC-based positioning systems
- Semiconductor lithography equipment
- Flat panel display manufacturing
Compatibility & Integration Requires Agilent 10884B power supply or equivalent 15 V source. Keysight E1709A receiver required for maximum linear velocity specification.
Agilent / Keysight 5517FL — Repair & Calibration Service
Aumictech offers NIST-traceable calibration and repair for the Agilent / Keysight 5517FL. Calibration covers output power at specified wavelengths, wavelength accuracy, 15-minute output stability, and modulation frequency accuracy where applicable. All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.
Common Agilent / Keysight 5517FL faults: laser diode end-of-life (output below spec), fiber output connector damage, output instability. Common repairs include laser diode replacement when output falls below spec, fiber output connector repair, and thermal management service.
Agilent / Keysight 5517FL price
This Agilent / Keysight 5517FL is listed at $950. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.
Agilent / Keysight 5517FL calibration cost
NIST-traceable calibration for the Agilent / Keysight 5517FL is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers output power at specified wavelengths, wavelength accuracy, 15-minute output stability, and modulation frequency accuracy where applicable. Turnaround is 1 to 3 business days after receipt. See full calibration details →
