Keithley 8009 Resistivity Test Fixture Reference

The Keithley 8009 Resistivity Test Fixture is a guarded test fixture for precise measurement of volume and surface resistivities in semiconductor materials. It delivers excellent electrostatic shielding and maintains high insulation resistance across test voltages up to 1000 V. The fixture measures volume resistivity up to 10¹⁸ Ω-cm and surface resistivity up to 10¹⁷ Ω/square in compliance with ASTM procedures.

Technical Specifications

Resistivity Measurement Capability

• Volume Resistivity: Up to 10¹⁸ Ω-cm


• Surface Resistivity: Up to 10¹⁷ Ω/square Sample Specifications


• Diameter: 64 mm to 102 mm


• Thickness: Up to 3.2 mm


• Contact Pressure: 6 to 10 lbs (uniform, thickness-dependent) Electrode Configuration


• Center Electrode: 50.8 mm O.D. ± 0.05 mm with conductive rubber pad (Shore A 70)


• Ring Electrode: 57.2 mm I.D. ± 0.05 mm


• Top Electrode: 85.7 mm O.D. ± 0.05 mm with 54 mm diameter conductive rubber pad


• Material: Type #303 Stainless Steel


• Concentricity: Within 0.01 in. of ring electrode center Electrical Performance


• Peak Source Voltage: 1 kV


• Peak Measure Voltage: 200 V (3-lug triaxial)


• Peak Common Mode Voltage: 200 V


• Test Current: 0.1 A Peak


• Power Consumption: 1 VA


• Typical Applied Test Voltages: 100 V, 250 V, 500 V, 1000 V Physical Characteristics


• Height: 108 mm


• Width: 165 mm


• Depth: 140 mm


• Weight: 1.45 kg Environmental Operating Range


• Temperature: -30°C to +85°C


• Humidity: 65% R.H. up to 35°C, derated 3% R.H./°C above 35°C


• Storage Temperature: -25°C to +85°C

Key Features

• Three-lug triaxial connector for direct integration with compatible electrometers


• Built-in interlock system (4-pin) automatically deactivates voltage when fixture lid opens


• High insulation resistance design supporting up to 1100 V operation


• Precise electrode tolerances ensure repeatable sample contact geometry

Compatibility & Integration Interfaced with Keithley Model 6517, 6517A, and 6517B Electrometers via three-lug triaxial connector.