Keithley 595 Quasistatic CV Meter

The Keithley 595 Quasistatic CV Meter is a specialized instrument designed for capacitance-voltage measurements. It employs a quasistatic technique to accurately characterize the C-V properties of semiconductor devices and materials. With its precision and stability, it provides valuable insights into device behavior and material characteristics.

Model
Keithley 595
Calibration
Available on request
Price
$1,730
Status
In stock
RFQ ref
595
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This unit

The Keithley 595 Quasistatic CV Meter is a specialized instrument for precise capacitance-voltage (C-V) characterization of Metal Insulator Semiconductor (MIS) devices and materials. It employs the quasistatic "feedback charge" method with integrated diagnostics and error corrections, delivering high-confidence measurements of semiconductor electrical properties. The instrument combines a programmable voltage source with a sensitive picoammeter, enabling comprehensive C-V and I-V analysis across wide dynamic ranges.


Technical Specifications

Capacitance Measurement

  • Measurement Range: 10 fF to 20 nF

  • Resolution: 0.01 fF to 0.01 pF (range-dependent)

  • Accuracy (1 Year, 18–28°C): ±(0.25% reading + 2 mV) for analog output

  • Leakage Current Correction: Included

  • Digital Filtering: Three non-recursive filters to reduce noise without curve distortion

  • Normalization: CO-referenced readings for gain error correction and device comparison Current Measurement

  • Range: 1 fA to 200 µA

  • Resolution: 0.01 fA to 0.01 nA per count (range, STEP V, and DELAY TIME dependent)

  • Accuracy (1 Year, 18–28°C): ±(1.0% reading + 2 counts), exclusive of input bias current and noise Voltage Source

  • Output Range: −20.00 V to +20.00 V

  • Increment: 0.01 V

  • Accuracy (1 Year, 18–28°C): ±(0.2% + 10 mV)

  • Maximum Output Current: ±2 mA; active current limit <4 mA

  • Settling Time: <3 ms to rated accuracy

  • Noise: <(1 ppm output voltage + 100 µV) p-p, 0.1–10 Hz

  • Waveforms: DC, staircase (STEP), and squarewave

  • Step Voltage: 0.01 V, 0.02 V, 0.05 V, or 0.10 V (±2%), selectable polarity

  • Delay Time: 0.07 s to 199.99 s in 0.01 s increments (±0.05%)

  • Maximum Input Voltage: 30 V peak, DC to 60 Hz sine wave


Key Features



  • Feedback charge method with built-in error diagnostics and corrections

  • Suppress function for relative C, C/CO, and I measurements

  • Wide capacitance range with femtofarad-level resolution

  • Picoammeter sensitivity spanning six decades

  • Multiple voltage waveform modes for diverse characterization protocols


Typical Applications



  • MIS device and material characterization

  • Semiconductor interface quality assessment

  • Oxide thickness and trap density analysis

  • Device-to-device capacitance comparison via normalization

Specifications

ParameterValue
Voltage / Current Range±2 mA max output

Keithley 595 — Repair & Calibration Service

Aumictech offers NIST-traceable calibration and repair for the Keithley 595. Calibration covers impedance magnitude accuracy at 100 Hz, 1 kHz, 10 kHz, and 100 kHz, dissipation factor (D) and quality factor (Q) accuracy, phase angle accuracy, open and short compensation verification, and cable length compensation. HP/Keysight 4284A additionally verified at 1 MHz.. All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.

Standard Cal
$450
Pass/fail cert + NIST sticker
Cal with Data
$650
Full NIST cert with measured values

Common Keithley 595 faults: GPIB interface board failure, display failure, guard terminal switch contact wear, oscillator calibration drift on older analog bridges. HP 4284A and 4285A most common faults are HPIB interface board failure and display contrast loss. The internal oscillator and vector measurement circuits are highly stable and rarely fail. Wayne Kerr and GenRad bridge instruments may develop switch contact wear on decade resistance/capacitance dials.

Keithley 595 price

This Keithley 595 is listed at $1,730. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.

Keithley 595 calibration cost

NIST-traceable calibration for the Keithley 595 is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers impedance magnitude accuracy at 100 Hz, 1 kHz, 10 kHz, and 100 kHz, dissipation factor (D) and quality factor (Q) accuracy, phase angle accuracy, open and short compensation verification, and cable length compensation. HP/Keysight 4284A additionally verified at 1 MHz.. Turnaround is 1 to 3 business days after receipt. See full calibration details →

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