Stanford Research CIS100 Gas Analyzers

Stanford Research Systems Laboratory Measurement Instruments. Resolution: Better than 0.1 amu.

Model
Stanford Research Systems CIS100
Calibration
Available on request
Price
$3,500
Status
In stock
RFQ ref
CIS100
View cart
Prefer to talk? Call +1 (484) 841-9341

This unit

The Stanford Research Systems CIS100 is a Closed Ion Source Gas Analyzer for precise quantitative gas composition measurement in laboratory and industrial environments. It combines a quadrupole mass spectrometer with an integrated CIS ionizer in a compact 2.75" Conflat® flange probe, enabling direct chamber connection for on-line process monitoring, gas purity verification, residual gas analysis, and leak detection without sample preparation or external ionizer modules.


Technical Specifications



  • Mass Range: 100 amu

  • Detection Limit: 1 ppm (electron multiplier), 10 ppm (Faraday cup), 1 × 10⁻¹² Torr

  • Maximum Operating Pressure: 10 mTorr

  • Resolution: Better than 0.1 amu

  • Mass Stability: ±0.1 amu after 30 minutes

  • Warm-up Time: Peak height ±2% after 3 minutes

  • Power Requirement: 24 VDC @ 2.5 A (optional AC line module available)

  • Computer Interface: RS-232C, 28,800 baud

  • Physical: 6 lbs, compact probe design with integrated control unit


Key Features



  • Gold-plated stainless steel ionizer reduces outgassing and resists reactive gases

  • Tungsten filament tolerates corrosive environments including WF₆ and silane exposure

  • Dual detector configuration: Faraday cup and continuous dynode electron multiplier

  • Field-replaceable electron multiplier and filament for minimal downtime

  • Windows-based software supports up to eight ECUs with real-time RGA analysis

  • Programmable mass scale tuning, sensitivity calibration, and ionizer setup

  • User-selectable output units: ppm, Torr, mbar, Pa, A

  • Data export in ASCII format; image export as META files or clipboard

  • Programmable alarms and electron multiplier gain adjustment


Typical Applications



  • On-line process gas monitoring and closed-loop control

  • Process gas purity verification at sub-ppm levels

  • High-vacuum residual gas analysis

  • Equipment leak detection and isolation


Compatibility & Integration Requires connection to a pumping system with minimum 40 L/s effective pumping speed and base pressure below 10⁻⁹ Torr. Optional O100TDP provides integrated turbo pump and diaphragm roughing pump for direct mounting.

Specifications

ParameterValue
Voltage / Current Range24 VDC @ 2.5 A

Stanford Research Systems CIS100 — Repair & Calibration Service

Aumictech offers NIST-traceable calibration and repair for the Stanford Research Systems CIS100. Calibration covers calibration scope varies by instrument type: vacuum gauges are verified at multiple pressure points against NIST-traceable pressure standards; spectrophotometers at wavelength accuracy and photometric accuracy points; strain gauge indicators at bridge excitation accuracy and full-scale output accuracy; pH meters against certified buffer solutions at pH 4, 7, and 10.. All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.

Standard Cal
$450
Pass/fail cert + NIST sticker
Cal with Data
$650
Full NIST cert with measured values

Common Stanford Research Systems CIS100 faults: vacuum gauge filament failure (ionization gauges), spectrophotometer D2 lamp end-of-life, wavelength motor failure, strain indicator front-panel binding post corrosion, pH electrode conditioning failure. Most specialty laboratory instruments fail at their electromechanical interfaces first — vacuum gauge connectors and filament assemblies, spectrophotometer lamp housings and motor drives, strain indicator binding post corrosion. Component-level repair is standard; manufacturer support for legacy instruments is often limited, making third-party bench repair the practical path.

Stanford Research Systems CIS100 price

This Stanford Research Systems CIS100 is listed at $3,500. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.

Stanford Research Systems CIS100 calibration cost

NIST-traceable calibration for the Stanford Research Systems CIS100 is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers calibration scope varies by instrument type: vacuum gauges are verified at multiple pressure points against NIST-traceable pressure standards; spectrophotometers at wavelength accuracy and photometric accuracy points; strain gauge indicators at bridge excitation accuracy and full-scale output accuracy; pH meters against certified buffer solutions at pH 4, 7, and 10.. Turnaround is 1 to 3 business days after receipt. See full calibration details →

Documents