Keithley 590 1MHz/100k C-V Analyzer
Keithley Laboratory Measurement Instruments. Accuracy: ±0.06% at 100 kHz.
- Model
- Keithley 590
- Calibration
- Available on request
- Price
- $5,570
- Status
- In stock
- RFQ ref
- 590
This unit
The Keithley 590 C-V Analyzer is a precision instrument for capacitance-voltage and capacitance-time measurements in semiconductor device characterization and quality control. Dual-frequency operation at 100 kHz and 1 MHz enables compliance with established test standards while optimizing resolution and accuracy. The analyzer measures capacitance, conductance, and voltage to extract critical device parameters including doping profiles, threshold voltage, oxide properties, mobile ion density, interface trap density, and minority carrier lifetime.
Technical Specifications Measurement Parameters:
Capacitance: 10 fF to 20 nF (100 kHz); sensitivity 0.1 fF
Conductance: 0.1 nS to 1 µS; sensitivity 0.1 nS
Test signal: 15 mV rms ±10%
Frequency tolerance: ±0.1% Bias Sources:
Internal: -20.000V to +20.000V, 5 mV steps, ±50 mA max, <1 ms settling
External: Up to ±200V DC input, 50 mA max Measurement Performance:
Rate: 1 to 1000 readings/second, selectable
Accuracy: ±0.06% at 100 kHz, ±0.08% at 1 MHz
Capacitance non-linearity: 20 or D < 0.05, 18–28°C) Data Handling:
Buffers A & B: 450 measurement triplets each (C, G, V)
C-t storage: Up to 1350 points Waveform Modes: DC, Stair, Dual Stair, Pulse
Key Features
Internal correction for transmission line and connection errors
Built-in correction value storage and analysis
Normalized capacitance calculation (C/C₀) and derived functions (1/C²)
C-V curve plotting capability
Operating range: 0°C to 50°C
Typical Applications Doping profile analysis, threshold voltage extraction, oxide characterization, mobile ion density assessment, interface trap density evaluation, minority carrier lifetime determination.
Specifications
| Parameter | Value |
|---|---|
| Frequency Range | 1 MHz, 100 kHz | Voltage / Current Range: '-20.000V to +20.000V (internal), ±50 mA max, Up to ±200V DC (external) |
Keithley 590 — Repair & Calibration Service
Aumictech offers NIST-traceable calibration and repair for the Keithley 590. Calibration covers impedance magnitude accuracy at 100 Hz, 1 kHz, 10 kHz, and 100 kHz, dissipation factor (D) and quality factor (Q) accuracy, phase angle accuracy, open and short compensation verification, and cable length compensation. HP/Keysight 4284A additionally verified at 1 MHz.. All calibrations ship with a NIST-traceable certificate. Turnaround is typically 1–3 business days after receipt.
Common Keithley 590 faults: GPIB interface board failure, display failure, guard terminal switch contact wear, oscillator calibration drift on older analog bridges. HP 4284A and 4285A most common faults are HPIB interface board failure and display contrast loss. The internal oscillator and vector measurement circuits are highly stable and rarely fail. Wayne Kerr and GenRad bridge instruments may develop switch contact wear on decade resistance/capacitance dials.
Keithley 590 price
This Keithley 590 is listed at $5,570. Calibration is available separately from $450. Contact us for volume pricing or if you need multiple units.
Keithley 590 calibration cost
NIST-traceable calibration for the Keithley 590 is $450 (standard — pass/fail certificate and calibration sticker) or $650 (full measured data at every test point, reference standards documented, traceability chain included). Calibration for this instrument covers impedance magnitude accuracy at 100 Hz, 1 kHz, 10 kHz, and 100 kHz, dissipation factor (D) and quality factor (Q) accuracy, phase angle accuracy, open and short compensation verification, and cable length compensation. HP/Keysight 4284A additionally verified at 1 MHz.. Turnaround is 1 to 3 business days after receipt. See full calibration details →
